The PlaCEP workshop brings together scientists and engineers specializing in cryogenic plasma processing of materials cooled to temperatures well below -10 °C. It covers plasma etching and deposition step development for the plasma processing of semiconductors, dielectrics, and metals. Modeling, simulation, diagnostics and process development are among the main topics covered at the conference. A technological section devoted to the development of cryogenic systems for efficient substrate cooling will also be included. The aim of the workshop is to gain a better understanding of the physical and chemical surface phenomena occurring when a substrate, interacting with plasma, is cooled to a very low temperature.