About the C2P2L platform
This platform is a set of equipment available to the laboratory for the development of micro/nano-objects and the optimization of plasma deposition and etching processes using nanofabrication technologies.
Comprising a 100-m2 ISO 6 clean room and an adjoining ISO 8 clean room, the platform includes several plasma process reactors and a large number of means for materials characterization.
Some equipment has been acquired as part of the GIS CERTeM for research in synergy with other partners in projects such as PIA Tours2015 with ST Microelectronics. Other equipment has been acquired as part of the DECAP platform of the ARD PIVOTS project on the Orléans campus, for the manufacture and characterization of new environmental sensors.
As part of contractual or non-contractual projects with laboratories on the Orléans campus, the GREMI opens its platforms to other laboratories and industries.
Clean room
Microscopies and Observation
Scanning Electron Microscope (+EDX)
Atomic Force Microscope
Surface treatments
Plasma-assisted chemical vapor deposition
Cleaning and activation
Rapid annealing
Physico-chemical and electrical characterization
Surface wettability measurement
4-point resistivity measurement
Hall effect measurement of electronic properties
X-ray diffraction
Multi-scale pattern creation
Multi-level optical aligner
Joint resources
Chip assembly